Inventor
DIBATTISTA MICHAEL
US10 patents
⚠️ This page may combine multiple inventors who share the name “DIBATTISTA MICHAEL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
INTEL CORP
7 patentsUS6825557B2Nov 30, 2004
Localized backside chip cooling with integrated smart valves
INTEL CORP62 citations95
US6355494B1Mar 12, 2002
Method and apparatus for controlling material removal from a semiconductor substrate using induced current endpointing
INTEL CORP27 citations92
US6975184B2Dec 13, 2005
Adjusting the frequency of film bulk acoustic resonators
INTEL CORP17 citations81
US7232526B2Jun 19, 2007
Method and apparatus for controlling material removal from semiconductor substrate using induced current endpointing
INTEL CORP4 citations73
US6579732B2Jun 17, 2003
Method and apparatus for controlling material removal from a semiconductor substrate using induced current endpointing
INTEL CORP5 citations73
US6780658B2Aug 24, 2004
Method and apparatus for controlling material removal from a semiconductor substrate using induced current endpointing
INTEL CORP0 citations51
US7183122B2Feb 27, 2007
Physical nano-machining with a scanning probe system for integrated circuit modification
INTEL CORP0 citations42