Inventor
TILGHMAN ROY H
US3 patents
Patents
3 patentsUS7462527B2Dec 9, 2008
Method of forming nitride films with high compressive stress for improved PFET device performance
IBM14 citations89
US7804136B2Sep 28, 2010
Method of forming nitride films with high compressive stress for improved PFET device performance
IBM0 citations49
US7491660B2Feb 17, 2009
Method of forming nitride films with high compressive stress for improved PFET device performance
IBM0 citations49