Inventor

VOGES CHRISTOPHER

US3 patents

⚠️ This page may combine multiple inventors who share the name “VOGES CHRISTOPHER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

VOGES CHRISTOPHER

1 patent

US8426223B2Apr 23, 2013

Wafer edge inspection

VOGES CHRISTOPHER10 citations76

RUDOLPH TECHNOLOGIES INC

1 patent

US9062859B2Jun 23, 2015

Wafer edge inspection illumination system

RUDOLPH TECHNOLOGIES INC1 citations48

RUDOLPH TECH INC

1 patent

US11578967B2Feb 14, 2023

Wafer inspection system including a laser triangulation sensor

RUDOLPH TECH INC0 citations44