Inventor

PHILIP ANTONY RAVI

US3 patents

⚠️ This page may combine multiple inventors who share the name “PHILIP ANTONY RAVI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CARLSON ALAN

1 patent

US8492178B2Jul 23, 2013

Method of monitoring fabrication processing including edge bead removal processing

CARLSON ALAN9 citations81

VOGES CHRISTOPHER

1 patent

US8426223B2Apr 23, 2013

Wafer edge inspection

VOGES CHRISTOPHER10 citations76

RUDOLPH TECHNOLOGIES INC

1 patent

US9062859B2Jun 23, 2015

Wafer edge inspection illumination system

RUDOLPH TECHNOLOGIES INC1 citations48