Inventor

SPERLING FRANK BERNHARD

NL3 patents

⚠️ This page may combine multiple inventors who share the name “SPERLING FRANK BERNHARD”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KONINKLIJKE PHILIPS NV

1 patent

US9507276B2Nov 29, 2016

Positioning device, control device and control method

KONINKLIJKE PHILIPS NV4 citations66

AUER-JONGEPIER SUZAN LEONIE

1 patent

US8634052B2Jan 21, 2014

Lithographic apparatus and method involving a ring to cover a gap between a substrate and a substrate table

AUER-JONGEPIER SUZAN LEONIE3 citations52

ASML NETHERLANDS BV

1 patent

US12007693B2Jun 11, 2024

Laser focussing module

ASML NETHERLANDS BV0 citations38