Inventor
OOTA MASASHI
JP54 patents
Patents
50 patentsUS9123573B2Sep 1, 2015
Oxide semiconductor stacked film and semiconductor device
SEMICONDUCTOR ENERGY LAB79 citations98
US8890159B2Nov 18, 2014
Oxide semiconductor stacked film and semiconductor device
SEMICONDUCTOR ENERGY LAB61 citations98
US9559174B2Jan 31, 2017
Semiconductor film, transistor, semiconductor device, display device, and electronic appliance
SEMICONDUCTOR ENERGY LAB22 citations94
US9406760B2Aug 2, 2016
Semiconductor film, transistor, semiconductor device, display device, and electronic appliance
SEMICONDUCTOR ENERGY LAB24 citations94
US9064966B2Jun 23, 2015
Semiconductor device with oxide semiconductor
SEMICONDUCTOR ENERGY LAB32 citations94
US10892282B2Jan 12, 2021
Metal oxide film and method for forming metal oxide film
SEMICONDUCTOR ENERGY LAB8 citations93
US9881939B2Jan 30, 2018
Metal oxide film and method for forming metal oxide film
SEMICONDUCTOR ENERGY LAB10 citations93
US9831274B2Nov 28, 2017
Metal oxide film and method for forming metal oxide film
SEMICONDUCTOR ENERGY LAB10 citations93
US9349875B2May 24, 2016
Semiconductor device and electronic device including the semiconductor device
SEMICONDUCTOR ENERGY LAB18 citations93
US8860023B2Oct 14, 2014
Semiconductor device
SEMICONDUCTOR ENERGY LAB15 citations93
US10032928B2Jul 24, 2018
Semiconductor film, transistor, semiconductor device, display device, and electronic appliance
SEMICONDUCTOR ENERGY LAB16 citations92
US11652110B2May 16, 2023
Metal oxide film and method for forming metal oxide film
SEMICONDUCTOR ENERGY LAB4 citations86
US10522347B2Dec 31, 2019
Method for manufacturing sputtering target, method for forming oxide film, and transistor
SEMICONDUCTOR ENERGY LAB4 citations84
US10461099B2Oct 29, 2019
Metal oxide film and method for forming metal oxide film
SEMICONDUCTOR ENERGY LAB5 citations84
US10388738B2Aug 20, 2019
Composite oxide semiconductor and method for manufacturing the same
SEMICONDUCTOR ENERGY LAB6 citations84
US10374030B2Aug 6, 2019
Metal oxide semiconductor device
SEMICONDUCTOR ENERGY LAB5 citations84
US10026847B2Jul 17, 2018
Semiconductor element, method for manufacturing semiconductor element, and semiconductor device including semiconductor element
SEMICONDUCTOR ENERGY LAB8 citations84
US9871058B2Jan 16, 2018
Metal oxide film and method for forming metal oxide film
SEMICONDUCTOR ENERGY LAB6 citations84
US9831353B2Nov 28, 2017
Semiconductor device, display device, display module, electronic device, oxide, and manufacturing method of oxide
SEMICONDUCTOR ENERGY LAB8 citations84
US9806201B2Oct 31, 2017
Semiconductor device
SEMICONDUCTOR ENERGY LAB16 citations84
US9685563B2Jun 20, 2017
Semiconductor device and electronic device including the semiconductor device
SEMICONDUCTOR ENERGY LAB5 citations84
US9595435B2Mar 14, 2017
Method for forming multilayer film including oxide semiconductor film and method for manufacturing semiconductor device
SEMICONDUCTOR ENERGY LAB10 citations84
US9583570B2Feb 28, 2017
Oxide semiconductor stacked film and semiconductor device
SEMICONDUCTOR ENERGY LAB12 citations84
US9496413B2Nov 15, 2016
Semiconductor device
SEMICONDUCTOR ENERGY LAB4 citations84
US9496330B2Nov 15, 2016
Oxide semiconductor film and semiconductor device
SEMICONDUCTOR ENERGY LAB8 citations84
US9437428B2Sep 6, 2016
Method of manufacturing a semiconductor device having an oxide semiconductor layer with increased hydrogen concentration
SEMICONDUCTOR ENERGY LAB7 citations84
US9425217B2Aug 23, 2016
Semiconductor device
SEMICONDUCTOR ENERGY LAB8 citations84
US9343578B2May 17, 2016
Semiconductor device and measurement device
SEMICONDUCTOR ENERGY LAB7 citations84
US9293541B2Mar 22, 2016
Semiconductor device
SEMICONDUCTOR ENERGY LAB10 citations84
US9281407B2Mar 8, 2016
Semiconductor device
SEMICONDUCTOR ENERGY LAB5 citations84
US9267199B2Feb 23, 2016
Method for manufacturing sputtering target, method for forming oxide film, and transistor
SEMICONDUCTOR ENERGY LAB6 citations84
US9035305B2May 19, 2015
Semiconductor device
SEMICONDUCTOR ENERGY LAB5 citations84
US11637015B2Apr 25, 2023
Method for manufacturing sputtering target, method for forming oxide film, and transistor
SEMICONDUCTOR ENERGY LAB1 citations73
US11139166B2Oct 5, 2021
Method for manufacturing sputtering target, method for forming oxide film, and transistor
SEMICONDUCTOR ENERGY LAB1 citations73
US10316404B2Jun 11, 2019
Method for manufacturing sputtering target
SEMICONDUCTOR ENERGY LAB2 citations73
US9911864B2Mar 6, 2018
Semiconductor device
SEMICONDUCTOR ENERGY LAB3 citations73
US9825179B2Nov 21, 2017
Oxide semiconductor, transistor, and semiconductor device
SEMICONDUCTOR ENERGY LAB3 citations73
US9761734B2Sep 12, 2017
Semiconductor device
SEMICONDUCTOR ENERGY LAB4 citations73
US9577107B2Feb 21, 2017
Oxide semiconductor film and method for forming oxide semiconductor film
SEMICONDUCTOR ENERGY LAB2 citations73
US9535277B2Jan 3, 2017
Conductive oxide film, display device, and method for forming conductive oxide film
SEMICONDUCTOR ENERGY LAB5 citations73
US12302639B2May 13, 2025
Metal oxide film and method for forming metal oxide film
SEMICONDUCTOR ENERGY LAB0 citations63
US11978742B2May 7, 2024
Metal oxide film and method for forming metal oxide film
SEMICONDUCTOR ENERGY LAB0 citations63
US10886373B2Jan 5, 2021
Composite oxide semiconductor and method for manufacturing the same
SEMICONDUCTOR ENERGY LAB0 citations63
US12550332B2Feb 10, 2026
Ferroelectric device and semiconductor device
SEMICONDUCTOR ENERGY LAB0 citations62
US12349460B2Jul 1, 2025
Manufacturing method of semiconductor device
SEMICONDUCTOR ENERGY LAB0 citations62
US11967505B2Apr 23, 2024
Method for manufacturing sputtering target, method for forming oxide film, and transistor
SEMICONDUCTOR ENERGY LAB0 citations62
US12426313B2Sep 23, 2025
Semiconductor device
SEMICONDUCTOR ENERGY LAB0 citations52
US10084096B2Sep 25, 2018
Semiconductor device and method of manufacturing the same
SEMICONDUCTOR ENERGY LAB0 citations52
US9761733B2Sep 12, 2017
Semiconductor device and method of manufacturing the same
SEMICONDUCTOR ENERGY LAB1 citations52
US9748328B2Aug 29, 2017
Oxide semiconductor film
SEMICONDUCTOR ENERGY LAB0 citations52
Showing the top 50 of 54 patents by PatentIndex Score.