Inventor
VISWANATHAN RAMAN GOBICHETTIPA
US7 patents
Patents
7 patentsUS6051483AApr 18, 2000
Formation of ultra-shallow semiconductor junction using microwave annealing
IBM53 citations95
US6316123B1Nov 13, 2001
Microwave annealing
IBM15 citations92
US6172399B1Jan 9, 2001
Formation of ultra-shallow semiconductor junction using microwave annealing
IBM19 citations92
US6051283AApr 18, 2000
Microwave annealing
IBM22 citations92
US5781607AJul 14, 1998
Membrane mask structure, fabrication and use
IBM22 citations90
US6009143ADec 28, 1999
Mirror for providing selective exposure in X-ray lithography
IBM2 citations55
US6440639B1Aug 27, 2002
High-aspect ratio resist development using safe-solvent mixtures of alcohol and water
IBM0 citations50