Inventor

VAN DEN BOOM STEPHANUS H L

NL2 patents

Patents

2 patents

US9202670B2Dec 1, 2015

Method of investigating the wavefront of a charged-particle beam

FEI CO3 citations57

US10651007B2May 12, 2020

Cryogenic cell for mounting a specimen in a charged particle microscope

FEI CO0 citations39