Inventor

NABETA KAZUYA

JP3 patents

⚠️ This page may combine multiple inventors who share the name “NABETA KAZUYA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HITACHI INT ELECTRIC INC

2 patents

US10755962B2Aug 25, 2020

Substrate processing apparatus and method of manufacturing semiconductor device

HITACHI INT ELECTRIC INC0 citations43

US9842754B2Dec 12, 2017

Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium

HITACHI INT ELECTRIC INC0 citations39

NABETA KAZUYA

1 patent

US9305820B2Apr 5, 2016

Substrate processing apparatus and method of manufacturing semiconductor device

NABETA KAZUYA2 citations47