Inventor

UKAE NAOKI

JP2 patents

⚠️ This page may combine multiple inventors who share the name “UKAE NAOKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

NABETA KAZUYA

1 patent

US9305820B2Apr 5, 2016

Substrate processing apparatus and method of manufacturing semiconductor device

NABETA KAZUYA2 citations47

HITACHI INT ELECTRIC INC

1 patent

US10755962B2Aug 25, 2020

Substrate processing apparatus and method of manufacturing semiconductor device

HITACHI INT ELECTRIC INC0 citations43