Inventor

SHIMIZU MITSUKO

JP4 patents

⚠️ This page may combine multiple inventors who share the name “SHIMIZU MITSUKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOSHIBA KK

2 patents

US6313476B1Nov 6, 2001

Charged beam lithography system

TOSHIBA KK56 citations95

US6346354B1Feb 12, 2002

Pattern writing method

TOSHIBA KK12 citations73

TOSHIBA MEMORY CORP

2 patents

US10782621B2Sep 22, 2020

Imprint method, imprint apparatus, and template

TOSHIBA MEMORY CORP0 citations50

US9971342B2May 15, 2018

Pattern data creating method, template, and semiconductor device manufacturing method

TOSHIBA MEMORY CORP1 citations49