Inventor
SEO JONG-HWI
KR5 patents
Patents
5 patentsUS11027394B2Jun 8, 2021
Load cup and chemical mechanical polishing apparatus and method of manufacturing including the same
SAMSUNG ELECTRONICS CO LTD2 citations68
US9081057B2Jul 14, 2015
Probe card handling carriage
SAMSUNG ELECTRONICS CO LTD3 citations59
US11577364B2Feb 14, 2023
Conditioner and chemical mechanical polishing apparatus including the same
SAMSUNG ELECTRONICS CO LTD1 citations58
US11269321B2Mar 8, 2022
Equipment diagnosis system and method based on deep learning
SAMSUNG ELECTRONICS CO LTD0 citations47
US11189533B2Nov 30, 2021
Wafer quality inspection method and apparatus, and semiconductor device manufacturing method including the wafer quality inspection method
SAMSUNG ELECTRONICS CO LTD0 citations47