Inventor

MARKS JAMES M

US3 patents

⚠️ This page may combine multiple inventors who share the name “MARKS JAMES M”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SENTEC CORP

2 patents

US5923423AJul 13, 1999

Heterodyne scatterometer for detecting and analyzing wafer surface defects

SENTEC CORP162 citations96

US6597446B2Jul 22, 2003

Holographic scatterometer for detection and analysis of wafer surface deposits

SENTEC CORP39 citations90

EATON CORP

1 patent

US5343179AAug 30, 1994

Miniaturized solenoid operated trip device

EATON CORP65 citations92