Inventor
MORGENSCHWEIS ANJA
DE3 patents
Patents
3 patentsUS6455369B1Sep 24, 2002
Method for fabricating a trench capacitor
INFINEON TECHNOLOGIES AG50 citations91
US6734077B2May 11, 2004
Method for fabricating a trench capacitor for a semiconductor memory
INFINEON TECHNOLOGIES AG21 citations88
US6645839B2Nov 11, 2003
Method for improving a doping profile for gas phase doping
INFINEON TECHNOLOGIES AG3 citations59