Inventor
ANBAI KATSUHIKO
JP3 patents
Patents
3 patentsUS7670138B2Mar 2, 2010
Quartz-product baking method and quartz product
TOKYO ELECTRON LTD3 citations56
US8021623B2Sep 20, 2011
Examination method and examination assistant device for quartz product of semiconductor processing apparatus
TOKYO ELECTRON LTD0 citations37
US7829475B2Nov 9, 2010
Baking method of quartz products, computer program and storage medium
TOKYO ELECTRON LTD0 citations32