Inventor
KADOBE MASATO
JP7 patents
⚠️ This page may combine multiple inventors who share the name “KADOBE MASATO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
6 patentsUS5447294ASep 5, 1995
Vertical type heat treatment system
TOKYO ELECTRON LTD493 citations97
US11581198B2Feb 14, 2023
Processing apparatus
TOKYO ELECTRON LTD0 citations59
US7670138B2Mar 2, 2010
Quartz-product baking method and quartz product
TOKYO ELECTRON LTD3 citations56
US12557593B2Feb 17, 2026
Substrate processing apparatus
TOKYO ELECTRON LTD0 citations49
US12398830B2Aug 26, 2025
Piping structure and processing apparatus
TOKYO ELECTRON LTD0 citations49
US11302542B2Apr 12, 2022
Processing apparatus
TOKYO ELECTRON LTD0 citations47