Inventor
SYU SHU-JIA
TW4 patents
Patents
4 patentsUS8334216B2Dec 18, 2012
Method for producing silicon nanostructures
LIN CHING-FUH22 citations89
US8193095B2Jun 5, 2012
Method for forming silicon trench
LIN CHING-FUH18 citations82
US8889017B2Nov 18, 2014
Method for producing silicon waveguides on non-SOI substrate
LIN CHING-FUH1 citations50
US8101522B2Jan 24, 2012
Silicon substrate having nanostructures and method for producing the same and application thereof
LIN CHING-FUH1 citations49