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Inventor
NICHOLSON PHILLIP B
US
2 patents
⚠️ This page may combine multiple inventors who share the name “NICHOLSON PHILLIP B”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
(unassigned)
1 patent
US5513594A
May 7, 1996
Clamp with wafer release for semiconductor wafer processing equipment
90 citations
93
VARIAN ASSOCIATES
1 patent
US5605866A
Feb 25, 1997
Clamp with wafer release for semiconductor wafer processing equipment
VARIAN ASSOCIATES
30 citations
91