Inventor

NAM KI-HUM

KR3 patents

Patents

3 patents

US5902102AMay 11, 1999

Diffusion furnace used for semiconductor device manufacturing process

SAMSUNG ELECTRONICS CO LTD17 citations77

US5938852AAug 17, 1999

Cap for vertical furnace

SAMSUNG ELECTRONICS CO LTD17 citations76

US5899690AMay 4, 1999

Thermal processing apparatus for semiconductor wafer

SAMSUNG ELECTRONICS CO LTD3 citations60