Inventor
DOKI MASAHIKO
JP10 patents
⚠️ This page may combine multiple inventors who share the name “DOKI MASAHIKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
FUJITSU LTD
9 patentsUS5976973ANov 2, 1999
Method of making a semiconductor device having planarized insulating layer
FUJITSU LTD319 citations95
US5620526AApr 15, 1997
In-situ cleaning of plasma treatment chamber
FUJITSU LTD69 citations94
US5310452AMay 10, 1994
Plasma process apparatus and plasma processing method
FUJITSU LTD62 citations94
US5231057AJul 27, 1993
Method of depositing insulating layer on underlying layer using plasma-assisted cvd process using pulse-modulated plasma
FUJITSU LTD62 citations94
US5160397ANov 3, 1992
Plasma process apparatus and plasma processing method
FUJITSU LTD78 citations94
US5183777AFeb 2, 1993
Method of forming shallow junctions
FUJITSU LTD24 citations92
US5103285AApr 7, 1992
Silicon carbide barrier between silicon substrate and metal layer
FUJITSU LTD40 citations92
US5506443AApr 9, 1996
Multilayer insulating film of semiconductor device and method for forming the film
FUJITSU LTD15 citations81
US5763005AJun 9, 1998
Method for forming multilayer insulating film of semiconductor device
FUJITSU LTD2 citations61