Inventor

HIGGINS EDWARD P

US2 patents

⚠️ This page may combine multiple inventors who share the name “HIGGINS EDWARD P”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

IBM

1 patent

US7864502B2Jan 4, 2011

In situ monitoring of wafer charge distribution in plasma processing

IBM17 citations76

BARKER BRIAN C

1 patent

US8634949B2Jan 21, 2014

Manufacturing management using tool operating data

BARKER BRIAN C8 citations75