Inventor
SCHUH NADJA
NL6 patents
⚠️ This page may combine multiple inventors who share the name “SCHUH NADJA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
5 patentsUS10908496B2Feb 2, 2021
Membrane for EUV lithography
ASML NETHERLANDS BV3 citations70
US12474629B2Nov 18, 2025
Membrane for EUV lithography
ASML NETHERLANDS BV0 citations60
US11762281B2Sep 19, 2023
Membrane for EUV lithography
ASML NETHERLANDS BV0 citations60
US9599908B2Mar 21, 2017
Lithographic apparatus and contamination removal or prevention method
ASML NETHERLANDS BV1 citations60
US7916269B2Mar 29, 2011
Lithographic apparatus and contamination removal or prevention method
ASML NETHERLANDS BV3 citations60