Inventor
Houshmand Farzad
US11 patents
Patents
11 patentsUS10879042B2Dec 29, 2020
Symmetric plasma source to generate pie shaped treatment
APPLIED MATERIALS INC5 citations83
US10903056B2Jan 26, 2021
Plasma source for rotating susceptor
APPLIED MATERIALS INC3 citations73
US10707058B2Jul 7, 2020
Symmetric and irregular shaped plasmas using modular microwave sources
APPLIED MATERIALS INC3 citations72
US10121655B2Nov 6, 2018
Lateral plasma/radical source
APPLIED MATERIALS INC3 citations70
US12142458B2Nov 12, 2024
Symmetric plasma source to generate pie-shaped treatment
APPLIED MATERIALS INC0 citations62
US11315769B2Apr 26, 2022
Plasma source for rotating susceptor
APPLIED MATERIALS INC0 citations62
US12340978B2Jun 24, 2025
Symmetric and irregular shaped plasmas using modular microwave sources
APPLIED MATERIALS INC0 citations61
US12282256B2Apr 22, 2025
Photoresist deposition using independent multichannel showerhead
APPLIED MATERIALS INC0 citations59
US12482641B2Nov 25, 2025
Printed microwave resonator for measuring high electron density plasmas
APPLIED MATERIALS INC0 citations56
US12503766B2Dec 23, 2025
Vapor concentration sensors for process chambers
APPLIED MATERIALS INC0 citations55
US11170982B2Nov 9, 2021
Methods and apparatus for producing low angle depositions
APPLIED MATERIALS INC0 citations49