Inventor

KRAUS PHILIP ALLAN

US72 patents

⚠️ This page may combine multiple inventors who share the name “KRAUS PHILIP ALLAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KRAUS PHILIP ALLAN

APPLIED MATERIALS INC

Substrate support with multiple embedded electrodes

System for tunable workpiece biasing in a plasma reactor

Substrate support with dual embedded electrodes

System for coupling a voltage to spatially segmented portions of the wafer with variable voltage

System for tunable workpiece biasing in a plasma reactor

System for coupling a voltage to portions of a substrate

Plasma method and apparatus for processing a substrate

Plasma method and apparatus for processing a substrate

Substrate support with electrically floating power supply

Wafer processing equipment having exposable sensing layers

Modular microwave source with embedded ground surface

Thermal repeatability and in-situ showerhead temperature monitoring

Wafer processing equipment having exposable sensing layers

Fluorine plasma treatment of high-k gate stack for defect passivation

Method for fabricating a gate dielectric of a field effect transistor

Substrate support with multiple embedded electrodes

Modular microwave source with embedded ground surface

Sensors and system for in-situ edge ring erosion monitor

Thermal repeatability and in-situ showerhead temperature monitoring

Modular microwave plasma source

Remote modular high-frequency source

Modular high-frequency source with integrated gas distribution

Substrate support with multiple embedded electrodes

Modular microwave plasma source

Phased array modular high-frequency source

Modular high-frequency source

Modular microwave source with local Lorentz force

Phased array modular high-frequency source

Symmetric and irregular shaped plasmas using modular microwave sources

Phased array modular high-frequency source

Monolithic modular microwave source with integrated process gas distribution

Seamless electrical conduit

Remote modular high-frequency source

MEMS resonator sensor substrate for plasma, temperature, stress, or deposition sensing

Plasma enhanced CVD with periodic high voltage bias

Modular high-frequency source

MEMS resonator sensor substrate for plasma, temperature, stress, or deposition sensing

Modular microwave source with local lorentz force

Pore formation in a substrate

Modular high-frequency source with integrated gas distribution

Thermal break for high-frequency antennae

Pore formation in a substrate

Selective etch rate monitor

Method for fabricating a gate dielectric of a field effect transistor

Symmetric and irregular shaped plasmas using modular microwave sources

Capacitive sensor for monitoring gas concentration

Monolithic modular microwave source with integrated process gas distribution

Monolithic modular microwave source with integrated temperature control

Capacitive sensor for monitoring gas concentration

KRAUS PHILIP ALLAN

Selective etch rate monitor