Inventor
WOLGAST STEPHEN C
US4 patents
⚠️ This page may combine multiple inventors who share the name “WOLGAST STEPHEN C”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
3 patentsUS6528767B2Mar 4, 2003
Pre-heating and load lock pedestal material for high temperature CVD liquid crystal and flat panel display applications
APPLIED MATERIALS INC561 citations95
US6924462B2Aug 2, 2005
Pedestal for flat panel display applications
APPLIED MATERIALS INC5 citations70
US10460960B2Oct 29, 2019
Gas panel apparatus and method for reducing exhaust requirements
APPLIED MATERIALS INC6 citations66