Inventor
MOSTOVOY ROMAN
US3 patents
Patents
3 patentsUS6416634B1Jul 9, 2002
Method and apparatus for reducing target arcing during sputter deposition
APPLIED MATERIALS INC56 citations93
US6428663B1Aug 6, 2002
Preventing defect generation from targets through applying metal spray coatings on sidewalls
APPLIED MATERIALS INC19 citations90
US6379428B1Apr 30, 2002
Method for reducing particle concentration within a semiconductor device fabrication tool
APPLIED MATERIALS INC5 citations60