Inventor
HANDA TATSUYA
JP6 patents
⚠️ This page may combine multiple inventors who share the name “HANDA TATSUYA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
4 patentsUS8896210B2Nov 25, 2014
Plasma processing apparatus and method
TOKYO ELECTRON LTD10 citations79
US7718005B2May 18, 2010
Film forming equipment and film forming method
TOKYO ELECTRON LTD2 citations59
US8758551B2Jun 24, 2014
Substrate processing apparatus and electrode structure
TOKYO ELECTRON LTD1 citations48
US12512302B2Dec 30, 2025
Gas treatment apparatus
TOKYO ELECTRON LTD0 citations47