Inventor
SASAHARA REIKO
JP7 patents
⚠️ This page may combine multiple inventors who share the name “SASAHARA REIKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
6 patentsUS8026150B2Sep 27, 2011
Semiconductor device manufacturing method and storage medium
TOKYO ELECTRON LTD3 citations61
US12381090B2Aug 5, 2025
Etching method and etching apparatus
TOKYO ELECTRON LTD1 citations55
US10964546B2Mar 30, 2021
Substrate processing method and method for removing boron-doped silicon
TOKYO ELECTRON LTD0 citations53
US11127597B2Sep 21, 2021
Etching method
TOKYO ELECTRON LTD0 citations51
US12512302B2Dec 30, 2025
Gas treatment apparatus
TOKYO ELECTRON LTD0 citations47
US11548804B2Jan 10, 2023
Method and apparatus for processing oxygen-containing workpiece
TOKYO ELECTRON LTD0 citations47