Inventor
CHIEN WEN-CHEN
TW4 patents
Patents
4 patentsUS6130149AOct 10, 2000
Approach for aluminum bump process
TAIWAN SEMICONDUCTOR MFG27 citations90
US7052374B1May 30, 2006
Multipurpose slurry delivery arm for chemical mechanical polishing
TAIWAN SEMICONDUCTOR MFG28 citations87
US6756309B1Jun 29, 2004
Feed forward process control method for adjusting metal line Rs
TAIWAN SEMICONDUCTOR MFG18 citations81
US6835649B2Dec 28, 2004
Tungsten plug with conductor capping layer
TAIWAN SEMICONDUCTOR MFG15 citations79