Inventor
KOENEN WILLEM HERMAN GERTRUDA
NL2 patents
Patents
2 patentsUS7333174B2Feb 19, 2008
Lithographic apparatus and method for determining Z position errors/variations and substrate table flatness
ASML NETHERLANDS BV140 citations93
US7012672B2Mar 14, 2006
Lithographic apparatus, system, method, computer program, and apparatus for height map analysis
ASML NETHERLANDS BV20 citations84