Inventor

SHEN TZERMIN

TW3 patents

Patents

3 patents

US7288822B1Oct 30, 2007

Semiconductor structure and fabricating method thereof

UNITED MICROELECTRONICS CORP48 citations95

US7524716B2Apr 28, 2009

Fabricating method of semiconductor structure

UNITED MICROELECTRONICS CORP16 citations91

US7294541B2Nov 13, 2007

Method of fabricating gate dielectric layer and method of fabricating semiconductor device

UNITED MICROELECTRONICS CORP0 citations47