Inventor
MUSSELMAN MARCUS
US9 patents
Patents
9 patentsUS10572697B2Feb 25, 2020
Method of etch model calibration using optical scatterometry
LAM RES CORP9 citations83
US11704463B2Jul 18, 2023
Method of etch model calibration using optical scatterometry
LAM RES CORP1 citations72
US11011353B2May 18, 2021
Systems and methods for performing edge ring characterization
LAM RES CORP3 citations72
US10997345B2May 4, 2021
Method of etch model calibration using optical scatterometry
LAM RES CORP3 citations72
US10386821B2Aug 20, 2019
Systems and methods for calibrating scalar field contribution values for a limited number of sensors including a temperature value of an electrostatic chuck and estimating temperature distribution profiles based on calibrated values
LAM RES CORP3 citations72
US10312121B2Jun 4, 2019
Systems and methods for aligning measurement device in substrate processing systems
LAM RES CORP2 citations69
US11029668B2Jun 8, 2021
Systems and methods for calibrating scalar field contribution values for a limited number of sensors including a temperature value of an electrostatic chuck and estimating temperature distribution profiles based on calibrated values
LAM RES CORP1 citations61
US11056405B2Jul 6, 2021
Methods and systems for controlling wafer fabrication process
LAM RES CORP0 citations49
US10763142B2Sep 1, 2020
System and method for determining field non-uniformities of a wafer processing chamber using a wafer processing parameter
LAM RES CORP0 citations38