Inventor
LIAO CHIH PING
TW6 patents
Patents
6 patentsUS12000455B2Jun 4, 2024
Systems and methods for reducing vibration of apparatuses
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations68
US12183573B2Dec 31, 2024
Device and method for high pressure anneal
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US11854800B2Dec 26, 2023
Device and method for high pressure anneal
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US11037781B2Jun 15, 2021
Device and method for high pressure anneal
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US11986869B2May 21, 2024
Method of cleaning, support, and cleaning apparatus
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations57
US12505987B2Dec 23, 2025
Semiconductor processing tool and methods of operation
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations44