Inventor

NANDA MADAN M

US3 patents

Patents

3 patents

US4978419ADec 18, 1990

Process for defining vias through silicon nitride and polyamide

IBM99 citations91

US4567132AJan 28, 1986

Multi-level resist image reversal lithography process

IBM33 citations87

US4640738AFeb 3, 1987

Semiconductor contact protection

IBM24 citations79