Inventor
ITAMI YASUSHI
JP4 patents
Patents
4 patentsUS6050768AApr 18, 2000
Automatic carrier control method in semiconductor wafer cassette transportation apparatus
MITSUBISHI ELECTRIC CORP87 citations95
US6169935B1Jan 2, 2001
Control method of stocker entry task and stocker exit task in semiconductor wafer cassette transportation apparatus
MITSUBISHI ELECTRIC CORP62 citations94
US6129496AOct 10, 2000
Semiconductor wafer cassette transportation apparatus and stocker used therein
MITSUBISHI ELECTRIC CORP78 citations94
US6151533ANov 21, 2000
Collation method of stocker storage in semiconductor wafer cassette transportation apparatus
MITSUBISHI ELECTRIC CORP17 citations90