Inventor
FRANKOWSKY BEATE
DE3 patents
Patents
3 patentsUS6571383B1May 27, 2003
Semiconductor device fabrication using a photomask designed using modeling and empirical testing
INFINEON TECHNOLOGIES AG27 citations90
US6902854B2Jun 7, 2005
Method for carrying out a rule-based optical proximity correction with simultaneous scatter bar insertion
INFINEON TECHNOLOGIES AG23 citations86
US7007260B2Feb 28, 2006
Method for fabricating an integrated semiconductor circuit
INFINEON TECHNOLOGIES AG0 citations36