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Inventor
HSU LAWRANCE
TW
2 patents
Patents
2 patents
US7122484B2
Oct 17, 2006
Process for removing organic materials during formation of a metal interconnect
TAIWAN SEMICONDUCTOR MFG
19 citations
90
US7067391B2
Jun 27, 2006
Method to form a metal silicide gate device
TAIWAN SEMICONDUCTOR MFG
6 citations
61