Inventor

MIYASHITA TOMOYASU

JP4 patents

⚠️ This page may combine multiple inventors who share the name “MIYASHITA TOMOYASU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HITACHI INT ELECTRIC INC

2 patents

US9394607B2Jul 19, 2016

Substrate processing apparatus

HITACHI INT ELECTRIC INC3 citations70

US11198935B2Dec 14, 2021

Heating part, substrate processing apparatus, and method of manufacturing semiconductor device

HITACHI INT ELECTRIC INC0 citations47

MIYASHITA TOMOYASU

1 patent

US8453600B2Jun 4, 2013

Substrate processing apparatus

MIYASHITA TOMOYASU13 citations76

KOKUSAI ELECTRIC CORP

1 patent

US10998205B2May 4, 2021

Substrate processing apparatus and manufacturing method of semiconductor device

KOKUSAI ELECTRIC CORP5 citations70