Inventor
PENG YA-AN
TW3 patents
Patents
3 patentsUS11747741B2Sep 5, 2023
Substrate stage, substrate processing system using the same, and method for processing substrate
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations71
US12111582B2Oct 8, 2024
Substrate stage and substrate processing system using the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11556065B2Jan 17, 2023
Wafer stage and method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations50