Inventor
OHTSUKA SEIICHIRO
JP5 patents
Patents
5 patentsUS5106593AApr 21, 1992
Apparatus for producing czochralski-grown single crystals
SHINETSU HANDOTAI KK26 citations88
US5868835AFeb 9, 1999
Apparatus for recharging of silicon granules in a czochralski single crystal growing operation
SHINETSU HANDOTAI KK16 citations80
US5089239AFeb 18, 1992
Wire vibration prevention mechanism for a single crystal pulling apparatus
SHINETSU HANDOTAI KK9 citations73
US5690733ANov 25, 1997
Method for recharging of silicon granules in a Czochralski single crystal growing operation
SHINETSU HANDOTAI KK11 citations72
US5129986AJul 14, 1992
Method for controlling specific resistance of single crystal and an apparatus therefor
SHINETSU HANDOTAI KK18 citations71