Inventor
FIEGE RONALD D
US6 patents
⚠️ This page may combine multiple inventors who share the name “FIEGE RONALD D”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
5 patentsUS6325696B1Dec 4, 2001
Piezo-actuated CMP carrier
IBM50 citations91
US7742160B2Jun 22, 2010
Determining angle of incidence with respect to workpiece
IBM4 citations60
US7646491B2Jan 12, 2010
Determining azimuth angle of incident beam to wafer
IBM0 citations50
US7542136B2Jun 2, 2009
Flipping stage arrangement for reduced wafer contamination cross section and improved measurement accuracy and throughput
IBM1 citations50
US7477365B2Jan 13, 2009
Optical spot geometric parameter determination using calibration targets
IBM0 citations39