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Inventor
HANEBECK JOCHEN
DE
2 patents
⚠️ This page may combine multiple inventors who share the name “HANEBECK JOCHEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
INFINEON TECHNOLOGIES AG
1 patent
US6635567B2
Oct 21, 2003
Method of producing alignment marks
INFINEON TECHNOLOGIES AG
19 citations
74
SIEMENS AG
1 patent
US5866485A
Feb 2, 1999
Techniques for etching a silicon dioxide-containing layer
SIEMENS AG
8 citations
67