Inventor
KUSAMA YOSHIHIRO
JP5 patents
⚠️ This page may combine multiple inventors who share the name “KUSAMA YOSHIHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
YASKAWA DENKI SEISAKUSHO KK
4 patentsUS7950890B2May 31, 2011
Vacuum robot, vacuum motor for vacuum robot, and production method of said vacuum motor
YASKAWA DENKI SEISAKUSHO KK28 citations90
US7789614B2Sep 7, 2010
Aligner
YASKAWA DENKI SEISAKUSHO KK9 citations79
US9272413B2Mar 1, 2016
Conveying system
YASKAWA DENKI SEISAKUSHO KK2 citations61
US7980611B2Jul 19, 2011
Substrate holding apparatus, substrate transferring robot equipped with the same, and semiconductor production apparatus
YASKAWA DENKI SEISAKUSHO KK5 citations61