P

Inventor

CHUNG TZU-YANG

TW5 patents
⚠️ This page may combine multiple inventors who share the name “CHUNG TZU-YANG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TAIWAN SEMICONDUCTOR MFG CO LTD

3 patents
US9478444B2Oct 25, 2016

Mechanisms for cleaning wafer and scrubber

TAIWAN SEMICONDUCTOR MFG CO LTD6 citations66
US10510527B2Dec 17, 2019

Single wafer cleaning tool with H2SO4 recycling

TAIWAN SEMICONDUCTOR MFG CO LTD1 citations55
US9781994B2Oct 10, 2017

Wafer cleaning

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations36

TAIWAN SEMICONDUCTOR MFG

1 patent
US6360756B1Mar 26, 2002

Wafer rinse tank for metal etching and method for using

TAIWAN SEMICONDUCTOR MFG20 citations89

KU SHAO YEN

1 patent
US9997384B2Jun 12, 2018

Methods for transporting wafers between wafer holders and chambers

KU SHAO YEN2 citations65