Inventor
KIMURA NORIO
JP161 patents
⚠️ This page may combine multiple inventors who share the name “KIMURA NORIO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
EBARA CORP
43 patentsUS6294059B1Sep 25, 2001
Substrate plating apparatus
EBARA CORP83 citations98
US5762539AJun 9, 1998
Apparatus for and method for polishing workpiece
EBARA CORP162 citations98
US5641054AJun 24, 1997
Magnetic levitation conveyor apparatus
EBARA CORP182 citations98
US5476414ADec 19, 1995
Polishing apparatus
EBARA CORP122 citations98
US6632335B2Oct 14, 2003
Plating apparatus
EBARA CORP114 citations97
US5716264AFeb 10, 1998
Polishing apparatus
EBARA CORP108 citations97
US6558229B2May 6, 2003
Polishing apparatus
EBARA CORP96 citations96
US6558239B2May 6, 2003
Polishing apparatus
EBARA CORP65 citations96
US6354907B1Mar 12, 2002
Polishing apparatus including attitude controller for turntable and/or wafer carrier
EBARA CORP58 citations96
US6077385AJun 20, 2000
Polishing apparatus
EBARA CORP59 citations96
US6019868AFeb 1, 2000
Polishing apparatus
EBARA CORP57 citations96
US5839947ANov 24, 1998
Polishing apparatus
EBARA CORP58 citations96
US5679063AOct 21, 1997
Polishing apparatus
EBARA CORP81 citations96
US5639388AJun 17, 1997
Polishing endpoint detection method
EBARA CORP101 citations96
US5384986AJan 31, 1995
Polishing apparatus
EBARA CORP88 citations96
US6939208B2Sep 6, 2005
Polishing apparatus
EBARA CORP42 citations95
US6689257B2Feb 10, 2004
Substrate processing apparatus and substrate plating apparatus
EBARA CORP54 citations95
US6663469B2Dec 16, 2003
Polishing method and apparatus
EBARA CORP57 citations95
US5651724AJul 29, 1997
Method and apparatus for polishing workpiece
EBARA CORP66 citations95
US5916412AJun 29, 1999
Apparatus for and method of polishing workpiece
EBARA CORP53 citations94
US6752692B2Jun 22, 2004
Cleaning method and polishing apparatus employing such cleaning method
EBARA CORP18 citations93
US6729946B2May 4, 2004
Polishing apparatus
EBARA CORP21 citations93
US6716330B2Apr 6, 2004
Electroless plating apparatus and method
EBARA CORP23 citations93
US6609950B2Aug 26, 2003
Method for polishing a substrate
EBARA CORP20 citations93
US6443821B1Sep 3, 2002
Workpiece carrier and polishing apparatus having workpiece carrier
EBARA CORP45 citations93
US6328629B1Dec 11, 2001
Method and apparatus for polishing workpiece
EBARA CORP37 citations93
US6325698B1Dec 4, 2001
Cleaning method and polishing apparatus employing such cleaning method
EBARA CORP31 citations93
US6196903B1Mar 6, 2001
Workpiece carrier and polishing apparatus having workpiece carrier
EBARA CORP19 citations93
US5670011ASep 23, 1997
Apparatus and method for polishing workpiece
EBARA CORP36 citations93
US5653623AAug 5, 1997
Polishing apparatus with improved exhaust
EBARA CORP38 citations93
US5653624AAug 5, 1997
Polishing apparatus with swinging structures
EBARA CORP25 citations93
US7055535B2Jun 6, 2006
Holding unit, processing apparatus and holding method of substrates
EBARA CORP38 citations92
US7040968B2May 9, 2006
Polishing apparatus
EBARA CORP28 citations92
US6722964B2Apr 20, 2004
Polishing apparatus and method
EBARA CORP17 citations92
US6544111B1Apr 8, 2003
Polishing apparatus and polishing table therefor
EBARA CORP41 citations92
US6416384B1Jul 9, 2002
Method and apparatus for polishing
EBARA CORP32 citations92
US6413156B1Jul 2, 2002
Method and apparatus for polishing workpiece
EBARA CORP31 citations92
US6406364B1Jun 18, 2002
Polishing solution feeder
EBARA CORP25 citations92
US6343978B1Feb 5, 2002
Method and apparatus for polishing workpiece
EBARA CORP20 citations92
US6322434B1Nov 27, 2001
Polishing apparatus including attitude controller for dressing apparatus
EBARA CORP25 citations92
US5989107ANov 23, 1999
Method for polishing workpieces and apparatus therefor
EBARA CORP27 citations92
US5921852AJul 13, 1999
Polishing apparatus having a cloth cartridge
EBARA CORP30 citations92
US5830041ANov 3, 1998
Method and apparatus for determining endpoint during a polishing process
EBARA CORP49 citations92
TOSHIBA KK
4 patentsUS5398459AMar 21, 1995
Method and apparatus for polishing a workpiece
TOSHIBA KK74 citations96
US5954570ASep 21, 1999
Conditioner for a polishing tool
TOSHIBA KK24 citations93
US7108589B2Sep 19, 2006
Polishing apparatus and method
TOSHIBA KK14 citations92
US5876273AMar 2, 1999
Apparatus for polishing a wafer
TOSHIBA KK30 citations92
TOKYO SHIBAURA ELECTRIC CO
1 patentCANON KK
1 patentMORITA KENICHIRO
1 patentShowing the top 50 of 161 patents by PatentIndex Score.