Inventor
LU HSIAO-FENG
TW5 patents
⚠️ This page may combine multiple inventors who share the name “LU HSIAO-FENG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
3 patentsUS12080545B2Sep 3, 2024
Showerhead assembly and method of servicing assembly for semiconductor manufacturing
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations58
US11769659B2Sep 26, 2023
Showerhead assembly and method of servicing assembly for semiconductor manufacturing
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations58
US12252777B2Mar 18, 2025
Physical vapor deposition (PVD) system and method of processing target
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations48