Inventor
MCGLENN TIM
US2 patents
Patents
2 patentsUS6921467B2Jul 26, 2005
Processing tools, components of processing tools, and method of making and using same for electrochemical processing of microelectronic workpieces
SEMITOOL INC37 citations91
US6632334B2Oct 14, 2003
Distributed power supplies for microelectronic workpiece processing tools
SEMITOOL INC24 citations88