Inventor

JYOUO KAZUHIRO

JP4 patents

⚠️ This page may combine multiple inventors who share the name “JYOUO KAZUHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HITACHI LTD

1 patent

US4615761AOct 7, 1986

Method of and apparatus for detecting an end point of plasma treatment

HITACHI LTD57 citations93

HITACHI HIGH TECH CORP

1 patent

US7259866B2Aug 21, 2007

Semiconductor fabricating apparatus with function of determining etching processing state

HITACHI HIGH TECH CORP9 citations73

HITACH HIGH TECHNOLOGIES CORP

1 patent

US6972848B2Dec 6, 2005

Semiconductor fabricating apparatus with function of determining etching processing state

HITACH HIGH TECHNOLOGIES CORP11 citations71

USUI TATEHITO

1 patent

US8071397B2Dec 6, 2011

Semiconductor fabricating apparatus with function of determining etching processing state

USUI TATEHITO0 citations50