Inventor
OTSUKA TAKEHIRO
JP3 patents
Patents
3 patentsUS9378944B2Jun 28, 2016
Method and apparatus of forming carbon film
TOKYO ELECTRON LTD1 citations47
US9279183B2Mar 8, 2016
Film forming apparatus and method of operating the same
TOKYO ELECTRON LTD1 citations47
US8993456B2Mar 31, 2015
Film forming apparatus and method of operating the same
TOKYO ELECTRON LTD0 citations47