Inventor
HUNG LOW FERNANDO
US6 patents
⚠️ This page may combine multiple inventors who share the name “HUNG LOW FERNANDO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CABOT MICROELECTRONICS CORP
4 patentsUS10988635B2Apr 27, 2021
Composition and method for copper barrier CMP
CABOT MICROELECTRONICS CORP1 citations59
US12227673B2Feb 18, 2025
Composition and method for silicon nitride CMP
CABOT MICROELECTRONICS CORP0 citations58
US10294399B2May 21, 2019
Composition and method for polishing silicon carbide
CABOT MICROELECTRONICS CORP0 citations48
US10968366B2Apr 6, 2021
Composition and method for metal CMP
CABOT MICROELECTRONICS CORP0 citations47